An apparatus for supporting a workpiece in a process chamber is provided, comprising a first \u201chot\u201d chuck having a surface for supporting the workpiece, the hot chuck including electrical heating elements for heating the hot chuck, and a second \u201ccold\u201d chuck having a fluid path formed therein for circulating a thermal transfer fluid. The Home Agent receives a registration request packet from the Mobile Node, the registration request packet including an IP source address and a Home Agent address. Thereafter, while sequentially activating the n second scanning signal line groups G2 to G2, the predetermined voltage is applied simultaneously to the n first scanning signal line groups G1 to G1. And the drawing result indication unit indicates the drawing inconvenience occurrence probability calculated by the analysis unit.