There are provided methods of fabricating a silicon-doped metal oxide layer on a semiconductor substrate using an atomic layer deposition technique. The cart has a base frame mounted on rear wheels and forward casters. The first spectrum may be a non-visible light spectrum and the second spectrum may be a visible light spectrum. Accordingly, aspects of the foregoing methods can be used to improve functioning in normal patients andor patients suffering from disorders such as cognitive disorders. The other portal incision provides for insertion into the patient’s hip of a member for driving the femoral stem into a cavity in the patient’s femur. A rule set is applied to the tracking data.