The present invention provides various methods for utilizing aspects of cleanspace fabricators. In accordance with the method of the present invention a composite wafer is formed. Also described is a method for producing a direct radiation converter which includes incorporating into a radiation detection material a doping profile running in the anode-side to cathode-side direction. The second contact plugs having a height greater than the first contact plugs. Oxygen may be purged from water by exposing the water to an inert gas having a sufficiently low O2 concentration. The tool assemblies attach to each other through their rotational attachment mechanisms.