A method for selectively removing portions of a diffusion aluminide coating from a substrate is described. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy. A server receives the sent message, compiles associated digital content based on information in the received message, and sends the digital content to the mobile device.