A delay locked loop apparatus includes a first delay element to receive a reference signal, to delay the reference signal by a delay time, and to output a first delayed signal. Then the horizontal scanning control circuits 101 and 102 are operated at different timings, and images formed by the active matrix regions 103 to 105 and 106 to 108 are synthesized and projected. The optical reader includes a first portion, a second portion, and an optical fiber. A dielectric layer of aluminum oxide, or a composite stack of interleaved layers of aluminum oxide and other metal oxide dielectric materials, is fabricated over the hemispherical grained polysilicon layer and after the optional nitridization or anneal process. The pre-heating may be carried out up to a temperature that is practicable without impairing the workpiece.