A semiconductor processing system for wafers or other semiconductor articles. A peripheral monitor 1 including a transmission antenna 2 for radiating transmission waves through the cover, a receiving antenna 3 for receiving reflected waves through the cover, and a data processor for measuring a distance to any object are disposed together in a cover 7. For the orifice opening 74, the opening ratio R between the transverse opening width along the axial direction and the longitudinal opening width along the circumferential direction is set in the range of 2\u2266R\u226625, further preferably 5\u2266R\u226620. The base structure and the solenoid areelongate and substantially coextensive with printhead. Full or partial reverse mode operation of the ancillary terrestrial network also may be provided, where at least some of the forward link and return link frequencies are interchanged with the conventional satellite forward link and reverse link frequencies.