1460743304-3c82ec8c-2ad5-462a-8881-dc44413fd474

A sensor adapted for measuring acceleration, the sensor including a light source for illuminating an optical cavity; the optical cavity oriented for receiving light from the source, the optical cavity comprising a quality factor greater than or equal to about 10,000; and a photodetector for measuring a resonant frequency of light emitted from the optical cavity. If another recipe of the recipe group has been run and adjustments have been made to the other recipe based on an analysis of a manufacturing or test run, the recipe management system identifies the selected recipe as requiring an update. An undoped polysilicon layer is formed over and in contact with the insulating layer. The push buttons are mounted onto the shell and electrically connected with the control unit. The hanger rail is attached to the base plate such that the hanger rail can be alternatively moved between a retracted hanger rail position wherein the hanger rail is proximal to the base plate and an extended hanger rail position wherein the hanger rail is spaced apart from the base plate.