A method for manufacturing a semiconductor device and a device manufactured using the same are provided. The battery-backup becomes operative when the AC power supply fails and supplied power to the receiver. An exhaust venting device for purification processes is also disclosed, which allows exhaust to be vented from the top of the reactor chamber, thereby avoiding backflow of exhaust into the silicon melt and erosion of the reactor. Further, a method for detecting whether a phase locked loop is out of lock or in lock is provided.