A method and an apparatus which removes vibration of a pickup. A current sensor that measures current I supplied by the at least one battery during the first and second periods. The locking piece is located at an inner periphery of the passage. Next, the substrate and developed photoresist layer are exposed to an ultraviolet light, where the UV light emanates from a UV generating agent. While a moving frame is moved within the search area of the high-frequency-component image, amounts of high-frequency component are calculated.