1460750937-627980f8-b93c-4cc1-8b46-590b325b4f72

A three-degree-of-freedom guideless reticle stage is used with a reaction force-countermass assembly. An electrical power source is connected to supply the corona and accelerating electrodes with an operating voltage to produce a high intensity electric field in an inter-electrode space between the corona electrodes and the accelerating electrodes. The input impedance can be changed by adjusting the distance between the two matching sections or the lengths of the two matching sections.