Provided is a method of fabricating a semiconductor device. A swash plate is operatively coupled to the drive shaft for rotation therewith. The coating can be produced by carrying out deposition and heat treatment steps that result in the entire coating or just the outer surface region of the coating consisting essentially of the stoichiometric celsian phase. The first vapor effluent stream, and a first wash flash vapor stream, are compressed from a first pressure to a second pressure greater than said first pressure to form a second vapor effluent stream, which is then cooled to form a cooled second effluent stream that is at least partially in the vapor state. These guide means comprise guide profiles fixed beneath the inner platforms of the stator vanes. The antenna includes a flexible dielectric substrate flexibly conformed about the core and an electrical conductor disposed on the dielectric substrate.