The invention provides novel liquid lansoprazole formulations comprising lansoprazole and an excipient system, wherein: the concentration of lansoprazole in the formulations ranges from about 0. In one aspect, a method of processing a semiconductor workpiece that has a device region and an inactive region is provided. The manifold valves are operable to place connected components into and out of fluid communication with the inlets and the passageway. Otherwise, as long as each screw is loose, the top and bottom cabinet boards, the left and right side boards and the back board can be decomposed so that each decomposed element can be easy folded, put, packed, transported and stored. In particular, the third liquid process to be performed on a first substrate of the substrate group is started before the first liquid process performed on a last substrate of the substrate group is ended, in such a manner that right after the first liquid process is performed on the last substrate, the second liquid process is to be performed on the first substrate.