Microelectronic devices may be fabricated while being protected from damage by electrostatic discharge. A fruit layer is positioned in the container. The flexibility and mechanical robustness of the actuators allows them to be shaped to conform to the surface to which they are applied. The LMS imports consumer and merchant calendars to coordinate the service schedule and sends automatic reminders to both to ensure service is performed as scheduled. The process kit component may include a part selected from the group of a shield, pedestal, shutter, coil, collimator, deposition ring, cover ring, and clamp ring. For in-plane configurations, a passive waveguide device guides light to and from the resonant cavity.