A method and associated systems for enhanced isolation and security hardening among multi-tenant workloads. The substrate processing apparatus includes a process chamber, a gas supply system, a gas discharge system, an RF unit, an electrode, and a control device. The other end of the separating channel and a forward end of the sample quantity control channel have opening and closing mechanisms, respectively. The topological change makes or would make the cascade probability closer to the optimal cascade probability. A filter element for filtering the exhaust-gas flow is arranged at least partially in the interior of the decoupling element and the filter element has a self-supporting construction, in particular, without carrier andor support bodies. Then, the writing magnetic pole portion is swung forward and backward around a rotation standard axis parallel to a center line of the writing magnetic pole portion in a direction parallel to a surface of the.