A method for fabricating a semiconductor device is capable of preventing a hard mask layer of a conductive structure from being damaged during a self-aligned contact etching process. Each retention member includes a slide assembly and a retention plate fixed to the slide assembly. The speaker is to direct audio substantially orthogonally through the back surface. The relatively soft seal ring may be affixed to a third seal ring or maybe affixed directly to the cone steel, for example. The method also includes repeating the pinging step for each remaining cell array to determine a total filled volume, and subtracting a volume of the digital part from the total filled volume to determine a support material volume.