The invention proposes a fuel delivery device for a fuel injection device of an internal combustion engine, having a delivery pump and having at least one high-pressure pump. The method includes receiving an EEG signal from the subject using at least one sensor, and defining at least two respiratory cycle segments within each respiratory cycle. At the maximum capacitance position, an initial measurement of the actuator capacitance is made. A round or partially rounded bottom is formed in the first metal layer to reduce mechanical stress near the diffusion barrier layer. DTU-R measures the line quality while receiving the probe signal.