Glucopyranosyl-substituted benzene derivatives of general formula Iwhere the groups R1 to R6 as well as R7a, R7b, R7c are defined herein and the tautomers, the stereoisomers thereof, the mixtures thereof and the salts thereof. Two bearing assemblies are adapted for supporting the sliding shaft. The ESC includes at least three groups of electrostatic blocks which chuck the substrate using electrostatic chucking forces respectively generated by different voltages applied to the electrostatic blocks in association with the electrostatic block groups, and release the chucked substrate when the voltages are cut off. An address generator contains an address buffer register which stores a random access address and an address sequencer which provides a stream of addresses to the memory array. The cannula coaxially receives the stylet and is movable between a second extended position and a second retracted position.