A scanning apparatus for scanning radiographic media comprises a housing with a scanning stage mounted within the housing. In one embodiment, a method is provided which includes sequentially exposing the substrate to a first precursor gas and at least a second precursor gas while depositing a material on the substrate during the ALD process, and continuously or periodically exposing the substrate to a treatment gas prior to andor during the ALD process. The suspension elements are arranged in a pattern wherein the longitudinal axis of each suspension element in the array is positioned at a right angle or parallel to the longitudinal axes of the adjacent suspension elements.