Method of fabricating a semiconductor device. In one embodiment, the reference microplate has a frame with an array of wells each of which contains an optical biosensor and each optical biosensor is at least partially coated with a substance. Thereafter, the method includes a high throughput first processing of the one or more first substrates and active layer deposition processing on the one or more first substrates. When chatter occurs, an electric motor is used to transmit a torque onto the rotating component in order to actively dampen the chatter. Finally, the spin-on dielectric is removed using a dry strip process with a low ion energy plasma. The coupling tube is formed of a hard and strong inner tube and a softer, somewhat compressible outer sheath which forms a seal with the inside of the hoop tube.