The disclosure concerns a projection objective, which can include an object plane in which an object field is formed, an entry pupil, a mirrored entry pupil in a mirrored entry pupil plane obtained by mirroring the entry pupil at the object plane, an image plane, an optical axis, at least a first mirror and a second mirror. 7 gramscc and a modulus to density ratio of between 1500 and 4000 and wherein said image is in contact with said vacuous polymer base. A plurality of electronic files may be received. The system further comprises a detector for receiving the reflected beam and a control circuit coupled to the detector. The adhesive materials can be shaped to conform to surfaces of the integrated circuit package andor heat sink, prior to hardening, such as by curing the adhesive material.