The semiconductor device comprises a substrate of semiconductor material, a contact hole reaching from a surface into the substrate, and a contact metallization arranged in the contact hole, so that the contact metallization forms an internal substrate contact on the semiconductor material at least in a bottom area of the contact hole. The apparatus includes an elongated non-fixed handle that is attached to a vacuum head with two inlet ports parallel to one another. The sample introduction system is preferably utilised in an analytical instrument, such as to determine the concentration of an analyte in a sample.