1460782214-2d0b7021-5a4d-4175-a040-6d5577956e17

An MR sensor, and a method for making it, is described. The carrier head includes a housing, a base, a loading mechanism, a gimbal mechanism, and a substrate backing assembly. Dividing lines are set to divide the first slab waveguide into two by intersecting dividing planes that intersect with a route of light traveling along the first slab waveguide.