Provided is a system and method of controlling power, the system and method capable of predicting optimal speeds of operation clocks of a central processing unit and a memory used to execute an application program, thereby reducing power used to execute the application program. According to the method, a space containing the patient’s nasopharynx, oropharynx or pharynx and larynx is isolated from the patient’s trachea and lungs using an inflatable cuff tracheostomy tube or nasotracheal tube inserted in the patient’s trachea. The diffusion barrier layer inhibits or impedes diffusion of species that may cause damage to the bottom plate or an underlying transistor, such as oxygen-containing species, hydrogen-containing species andor other undesirable species. The communicating substrate holding spaces allow the batch heat treatment of substrates, while the non-communicating substrate holding spaces allow the batch or individual processing of substrates. A pair of side blowing passages communicate the heater chamber and a mixing chamber. And the measured value can be indicated in graphics.