An antenna includes at least two planar conductors cooperatingly arranged in a planar configuration having a bifilar spiral winding structure, a log-periodic structure or a sinuous configuration and a frequency-independent reflective backing situated on one axial side of the planar configuration. A sleeve is also provided that has a sleeve, which at least partially overlaps the hose section on a side of the radial shoulder, which is axially opposite to a front side of the pipe facing toward the hose, and has a minimum internal diameter. In consequence, according to the cleaning method of the present invention, in manufacturing semiconductor devices or display devices, it is possible to extremely advantageously manufacture circuit wirings with a little burden on the environment, high precision and high quality on an industrial scale.