A magnetic resonance imaging device for imaging a volume is provided with at least one main magnet for generating a magnetic field, and at least one gradient coil for manipulating the magnetic field generated by the at least one main magnet to image the volume. Also, when forming the pattern, C5F8 gas is used at a main etching step to compensate etch tolerance of the photoresist for ArF. A vertical lifting column is fastened to the traveling crab for lifting and lowering a load receiving means for the empty container. Afterward, according to the LUNs in a received CMD response packet, operating status corresponding to the storage devices is determined. A refrigeration control unit at least controls the operation of the one or more evaporator fans.