A method of forming refractory metal nitride layers, such as a tantalum nitride barrier layer, on a substrate by using an atomic layer deposition process with a refractory metal precursor compound, an organic amine, and an optional silicon precursor compound. In the preferred embodiment, the counterweight mechanism operates in conjunction with a conventional, proven spring assist mechanism of the type that has been used in the past on trilevel railway cars. Each transparent conductive layer includes a carbon nanotube layer. The apparatus has a sheet-casting device used for primarily casting a liquid metal into an intermediate sheet, and a continuous shear-straining device used for continuously shear-straining the intermediate sheet from the sheet-casting device to form a desired sheet metal.