A three-axial acceleration sensor inspection device is provided for inspecting a three-axial acceleration sensor that detects acceleration components in three axes crossing perpendicularly with each other and outputs acceleration component signals. A first coupling path, which has a first impedance element, connects the feedback input to the signal output. The two circulation-guiding blocks are coupled to two ends of the base block. In addition, the through-holes are provided in a staggered configuration in the laminating direction. The thickness of the protective layer system is selected in such a way that it is less than d2.