Increased sidewall coverage by a sputtered material is achieved by generating an ionizing plasma in a relatively low pressure sputtering gas. It is already known to use a scattered-light device to determine whether a defect is present on the wafer. Thereafter a sample is introduced into each well of the base plate and an end of a capillary column is dipped into each well for applying a migration voltage and electrophoretically injecting the sample into the capillary column. The supply co-ordination element includes an angle drive mechanism and rotator housing assembly. In yet another embodiment, an ion inlet of the ion trap may be electronically controlled relative to operation of the ion mobility spectrometer as a function of ion drift time to thereby allow passage therein only of ions defining a mobility within the preselected ion mobility range. The high moisture absorbent nonwoven fabric structure, which is high in hygroscopicity, applicable to a small space, and easily recyclable by heat treating nonwoven fabrics after moisture absorbed, can be used in a variety of fields such as desiccants and dehumidifying agents.