A semiconductor device includes a substrate, and a through electrode passing through the substrate. A pump for supplying the pivot motor is provided, which pump is operated by way of a shaft of the exciter transmission. A second dichroic mirror separates the combined light into the red component light R on which a part of or all of the yellow component light Ye is superimposed and the green component light G on which the rest of the yellow component light Ye is superimposed. Imaging results with a fully integrated radiating CMOS power source demonstrate the first entirely silicon-based THz imager.