A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the illuminated portion of the specimen, analyzing the detected radiation for potential defects present in the specimen portion. The electronic devices communicate wirelessly with the security control system. An adjustment coupling permits the positions of the leaf spring ends to be longitudinally adjusted relative to the base to increase or decrease how much the leaf spring deflects and bows outwardly. The optical intensity modulator is coupled to receive light from the laser and is operable to intensity modulate the received laser light less in a high output power mode and to intensity modulate the received laser light more in a low output power mode.