In a method for manufacturing a micromechanical device having a region for forming an integrated circuit, at first a first layer is produced on a deeper-lying part in the substrate. The nozzle design results in a quasi-separate exhaust flow path with two separate nozzle throat areas, one for each detonation tube. The case is associated with a workflow that has steps anticipated to be executed for the case. The optical sensing member may include an optical fiber andor any known optical sensors.