The present invention relates to a solution for paging of idle user equipment and in particular for changing mode status from idle to connected in an efficient manner. The method comprises preparing a film stack on a substrate, wherein the film stack comprises a SiCOH-containing layer formed on the substrate, a silicon oxide layer formed on the SiCOH-containing layer, and a mask layer formed on the silicon oxide layer. The body portions also have a drawing slot positioned between the opposing top and bottom edges and extending at least partially between the front and back ends.