Method for manufacturing two disk-shaped workpieces using a sputter station includes providing a load-lock chamber and a sputtering source with a sputter surface. A conductive paste is applied to a first surface of a piezoelectric element in a desired pattern. The first DLL circuit generates a first internal clock signal so as to reduce a phase difference between a first clock signal fetched via the first buffer and the first internal clock signal transmitted to the first circuit. The pawl mechanism includes a pawl insert having one or more tie engagement surfaces, the insert being detachably coupled to a pawl body. In the group III-V compound semiconductor wafer of the present invention, the number of acid material atoms per 1 cm2 is at most 51012.