A multiprocessor data processing system includes a plurality of cache memories including a cache memory. The inner cup has a top shoulder and a bottom shoulder and the outside diameter of the inner cup at the level of the top shoulder increases toward the top edge of the inner cup. A deformation amount H1 of the toner compressed by a pressure of 0. A conveyor system for transporting wafers and a method for transferring wafers from a conveyor system to a wafer processing station also are described.