A negative pattern is formed by coating a resist composition comprising a polymer comprising recurring units of formulae and and a photoacid generator of formula onto a substrate, baking, exposure, PEB and developing in an organic solvent. In one embodiment, the method begins by prefabricating the frame by joining a plurality of parallel elongate members with cross-tie members. The detecting unit is adopted for detecting the brightness of the light in the light. The weight of the Au layer is preferably equal to or less than 0.