Methods of forming thin films include forming a first layer comprising a first element that is chemisorbed to a surface of a substrate, by exposing the surface to a first source gas having molecules therein that comprise the first element and a halogen. The apparatus includes two pairs of selectively heated rollers. The forceps is used to grasp tissue or blood vessels and apply heat to effect cauterization. A measure is taken as a function of the variable which results in a movement of the x-ray detector by the operating person andor by an automatic movement. , R1 denotes a hydrogen atom or an alkyl group having a carbon number of from 1 to 8; either one of R2 and R3 is a methyl group and the other is a hydrogen atom; and 10\u2266m\u226640 and 1\u2266n\u226650).