1460864702-a8bd27f4-a72e-45ed-b0db-988d509da441

A stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The apparatus includes a thread, at least one thread guide for guiding the thread such that at least a portion of the thread engages with the article, a unit for moving the thread relative to the at least one thread guide means, and a unit for applying a solvent to the thread before the thread contacts the article, wherein the first material is soluble in the solvent. Further, this invention relates to a composition used for the preparation of that photo-polymerized liquid crystal polymer of the invention, to processes of the preparation of that liquid crystal polymer and to its use.