An array of through-silicon vias are formed in a silicone substrate. In one embodiment the apparatus includes a probe assembly within a semiconductor wafer processing line. By merely a slight increase in a radial dimension, the area of a permanent magnet of the movable element can be sufficiently increased, and the capacity of the linear motor can be increased. A two-way control valve opens and closes the outlet opening, and thereby controls opening and closing of the pinch valve.