A system and method for detecting chamber leakage by measuring the reflectivity of an oxidized thin film. The potential of the plate line is raised and lowered. Additionally, a method of forming a lighting device is disclosed.
Algorithmically generated prior art
A system and method for detecting chamber leakage by measuring the reflectivity of an oxidized thin film. The potential of the plate line is raised and lowered. Additionally, a method of forming a lighting device is disclosed.