1460874678-cd0ab0c1-1089-4fff-9ed6-6b0a8ce323fd

A deposition system in accordance with one embodiment of the present invention includes a process chamber, a stationary pedestal for supporting a substrate in the process chamber, and a moveable shield forming at least a portion of an enclosure defining the process chamber. It follows that even where the read processing time of a single screen is shortened by allowing the processing cycles for the rows to partially overlap with each other, the reset period, the pre-charge period and the read period are prevented from being overlapped in time with each other, making it possible to perform the read operation accurately. A first collapsible assembly includes a front hub and four struts pivotally connected thereto. Heating information is provided and the temperatures of the primary and secondary sources are calculated. Capacitor structure 90 is attached to the terminal bar structure, and the first breakable section is selectively broken, alone or in combination with the second breakable section to provide versatile RFI suppression.