A processing device has plural processing modules executing a processing; and plural connectors each having a linking section, an associating section, and a controller. Loadingunloading occurs at the bottom end onto a carriage raised to the top end where baking occurs. The stator poles form S stator pole sets each consisting of A stator poles each of which corresponds to one of A phases, where S is an integer equal to. On the position surrounded by the first directional rib and the second directional rib, an atmosphere communication port is formed, and around the atmosphere communication, the communication port guide that extrudes into the containing portion is arranged.