A head gimbal assembly includes a load beam to support a slider where a readwrite head is mounted, a base plate arranged close to the load beam, and a step connection portion to connect the load beam and the base plate to be stepped from each other at a side of each of the load beam and the base plate. A crystallization method of iloperidone is also provided which comprises adding seed crystal to the iloperidone solution in ethyl acetate, and then iloperidone crystal is obtained with high purity by controlling the temperature and the stirring speed. The compression spring is installed in the chamber of the fixing member. Some of the optical encoders may be connected to the substrate table at different locations in the 3 dimensional coordinate system. The link minimizes state transition time at the end of each data pulse.