A robot includes a traveling rail supported by struts, and a robot body attached to a slider that slides on the traveling rail. The electron guns may emit electron beams to a substrate. A hot supplyreturn pipe, a cold supply pipe, and a cold return pipe. The phase-quantized samples of substantially equal magnitude with approximately the original phase are correlated with a reference signal. A silicon nitride or silicon carbide passivation layer may be provided between the thinned device wafer back side and the RDLs to provide a hermetic barrier and polish stop layer during the process flow.