The invention provides a method for controlling an electric motor and an apparatus for controlling the same, which lower vibrations generated due to low rigidity of a control object, secure vibration-suppressing performance without depending on instruction patterns and characteristics of a control object, and achieve high positioning accuracy. The substrate is placed on an upper surface of the plate-like support element. The load vacuum chamber is connected to a load vacuum pump configured to reduce the pressure within the load vacuum chamber to an initial load pressure.