The present invention relates to novel active ingredient combinations which consist of fluopyram and other known active ingredients and are very well suited for the control of animal pests, such as insects andor unwanted acarids andor nematodes, in foliar and soil application andor in the treatment of seeds, and are also suitable for increasing yields. According to the invention, such a steam cutting device, in which no, or almost no fluid is found in the burner in stand-by mode or after switch-off of the steam cutting device such that post-evaporation can be avoided, may be achieved, whereby a relief line is connected to the supply line, for relieving the supply line andor the burner, on or after the ending of the steam cutting process. The capacitance means held in one of the first and second source circuits converts a current including a current supplied from each of the n video-signal constant current source s to voltage in response to a sampling pulse supplied from the shift register and a latch pulse supplied from the exterior; and the supply means held in the other supplies a current responsive to the converted voltage. Light that has been emitted from the light source and incident to the light guide element via the light-incident side is totally reflected and is then guided to the first and the second diffusion surfaces and a part of diffusion-reflected light illuminates the light-transmissive portion of the panel. The plurality of processing subsystems and wafer handling subsystem form an integrated system.