A system and method for re-circulating processing fluids in a substrate processing system is provided. Preferably, an electromagnetic field or bias is applied to a dielectric. The memory is backed up with a battery. Features are extracted from the physiological data based on development of the physiological data over a period of time. The stabilization temperature is greater than a catalyst light off temperature. 1 cm, comprising water, an abrasive and, as an additive, at least one compound selected from the group consisting of an alkali metal hydroxide, an alkali metal carbonate, an alkali metal hydrogencarbonate, a quaternary ammonium salt, a peroxide and a peroxo acid compound.