Metal complex salts of the coordination elements listed in Groups IIIA to VIIIA, Groups IB to IIIB, of periods 4 and 5 and aluminum in Group IIIB, period 3 of The Periodic Table of the Elements, obtained as the reaction products of polyfunctional acids with two or more of such elements are described. The threaded based allows the device to be screwed into an powered by a conventional light socket, and the threaded receptacle serves as a conventional light socket to provide passive power to a standard light bulb. The three-dimensional position information can additionally be employed to determine the anchored viewing ray for the object. Thereby, the method for manufacturing the silicon carbide semiconductor device capable of improving insulation reliability of an insulating film can be provided. The substrate is annealed to diffuse the impurity region, thereby forming an impurity expansion region further expanding in an x direction of the substrate. The first bank may be arranged in parallel with the second bank and inlet of the first bank is configured to provide greater flow resistance to the exhaust than the inlet of the second bank.