A flow control system disrupts a reactive flow into a process chamber in order to shape the flow geometry issuing into a substrate processing chamber. The portion of data is at least one of written to and read from a subset of the plurality of memory cells, and the subset includes only fail cells among the plurality of memory cells. A vision module receives the reflected first image in the second direction and outputs the received first image to a computer. Sequentially, when the fixed material is fixed, cockling of the fixed material is sucked into the recess by the sucking hole of the suction chamber that is the recess, so that paper rising is prevented.