1460959875-f9ff7d6e-9eec-48b2-b9f1-8aecc5757e0d

In an embodiment, a trench is formed above a via from a photo resist trench pattern in a dielectric layer. The composite insulation material includes a syntactic foam component and a plurality of aerogel inserts. Disclosed is a high-molecular weight conjugate of a steroid, comprising a structure in which a carboxylic acid group of a polymer having a polyethylene glycol moiety and a succinic acid monoamide moiety having two or more succinic acid monoamide units is ester-bonded to a hydroxy group in the steroid.