A method of fabricating a semiconductor device includes forming an active region including opposing sidewalls and a surface therebetween protruding from a substrate. Performance indicators for a pulsed radiation source in a lithographic apparatus are based on moving averages and moving standard deviations of the error between target and actual pulse energies. The column air bag module works in conjunction with a standard driver air bag module. At this time, the particles of the piezoelectric material do not adhere to a surface of the low-elasticity material filled in the recess, and hence the piezoelectric layer can be formed only in an area excluding the surface of the low-elasticity material. Measured or predicted changes in network performance can be scored to provide relative priorities for allocating limited service personnel in repairing base station errors.